JPH0619347Y2 - 静電吸着装置 - Google Patents
静電吸着装置Info
- Publication number
- JPH0619347Y2 JPH0619347Y2 JP4134688U JP4134688U JPH0619347Y2 JP H0619347 Y2 JPH0619347 Y2 JP H0619347Y2 JP 4134688 U JP4134688 U JP 4134688U JP 4134688 U JP4134688 U JP 4134688U JP H0619347 Y2 JPH0619347 Y2 JP H0619347Y2
- Authority
- JP
- Japan
- Prior art keywords
- transparent
- voltage
- conductor
- transparent conductor
- adsorption
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001179 sorption measurement Methods 0.000 title claims description 23
- 239000004020 conductor Substances 0.000 claims description 22
- 239000003989 dielectric material Substances 0.000 claims description 6
- 239000012212 insulator Substances 0.000 claims description 6
- 230000001737 promoting effect Effects 0.000 claims description 2
- 239000010408 film Substances 0.000 description 11
- 239000002216 antistatic agent Substances 0.000 description 4
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000006258 conductive agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Landscapes
- Elimination Of Static Electricity (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4134688U JPH0619347Y2 (ja) | 1988-03-28 | 1988-03-28 | 静電吸着装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4134688U JPH0619347Y2 (ja) | 1988-03-28 | 1988-03-28 | 静電吸着装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01143295U JPH01143295U (en]) | 1989-10-02 |
JPH0619347Y2 true JPH0619347Y2 (ja) | 1994-05-18 |
Family
ID=31267787
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4134688U Expired - Lifetime JPH0619347Y2 (ja) | 1988-03-28 | 1988-03-28 | 静電吸着装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0619347Y2 (en]) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0744859B2 (ja) * | 1990-03-30 | 1995-05-15 | 株式会社アビサレ | 透明静電吸着シート |
JP6735552B2 (ja) * | 2015-12-08 | 2020-08-05 | エルジー ディスプレイ カンパニー リミテッド | 表示装置を静電吸着により固定する部材及び表示装置 |
-
1988
- 1988-03-28 JP JP4134688U patent/JPH0619347Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01143295U (en]) | 1989-10-02 |
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