JPH0619347Y2 - 静電吸着装置 - Google Patents

静電吸着装置

Info

Publication number
JPH0619347Y2
JPH0619347Y2 JP4134688U JP4134688U JPH0619347Y2 JP H0619347 Y2 JPH0619347 Y2 JP H0619347Y2 JP 4134688 U JP4134688 U JP 4134688U JP 4134688 U JP4134688 U JP 4134688U JP H0619347 Y2 JPH0619347 Y2 JP H0619347Y2
Authority
JP
Japan
Prior art keywords
transparent
voltage
conductor
transparent conductor
adsorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4134688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01143295U (en]
Inventor
伸一 橋詰
厚志 野田
秀基 佐藤
年浩 田島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp filed Critical Omron Corp
Priority to JP4134688U priority Critical patent/JPH0619347Y2/ja
Publication of JPH01143295U publication Critical patent/JPH01143295U/ja
Application granted granted Critical
Publication of JPH0619347Y2 publication Critical patent/JPH0619347Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Elimination Of Static Electricity (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP4134688U 1988-03-28 1988-03-28 静電吸着装置 Expired - Lifetime JPH0619347Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4134688U JPH0619347Y2 (ja) 1988-03-28 1988-03-28 静電吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4134688U JPH0619347Y2 (ja) 1988-03-28 1988-03-28 静電吸着装置

Publications (2)

Publication Number Publication Date
JPH01143295U JPH01143295U (en]) 1989-10-02
JPH0619347Y2 true JPH0619347Y2 (ja) 1994-05-18

Family

ID=31267787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4134688U Expired - Lifetime JPH0619347Y2 (ja) 1988-03-28 1988-03-28 静電吸着装置

Country Status (1)

Country Link
JP (1) JPH0619347Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0744859B2 (ja) * 1990-03-30 1995-05-15 株式会社アビサレ 透明静電吸着シート
JP6735552B2 (ja) * 2015-12-08 2020-08-05 エルジー ディスプレイ カンパニー リミテッド 表示装置を静電吸着により固定する部材及び表示装置

Also Published As

Publication number Publication date
JPH01143295U (en]) 1989-10-02

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